| 摘要 |
PURPOSE:To eliminate the deterioration of a membrane element at the time of separation, by simultaneously forming a large number of membrane elements on an insulating substrate having separating grooves of notches formed thereto at predetermined positions according to a membrane process and subsequently separating said elements. CONSTITUTION:Separating grooves or notches are preliminarily formed to an insulating substrate at predetermined positions. After a large number of membrane elements are simultaneously formed on the insulating substrate according to a membrane process, said membrane elements are annealed at temp. equal to or higher than the softening point of the substrate and gradually cooled to a strain point or lower to be separated. By employing this method, the substrate can be separated by slight force after the finish of the membrane process and, since the vibration generated when the grooves are formed is not applied to said elements and almost no force is applied thereto when the substrate is divided, the characteristic deterioration of the elements is reduced. Further, it is unnecessary to form a protective film when the elements are separated and cost reduction can be achieved.
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