发明名称 METHOD AND APPARATUS FOR DETECTING DEFECTS OF PRINTED CIRCUIT PATTERNS
摘要 A printed circuit pattern inspection system, in which the optical image of circuit patterns is transformed into an electrical signal, the signal is converted into a binary digital signal, the connectivity relationship between selected two points of pattern in the form of binary signal is examined, connection data representative of the connectivity relationship and expressed by a pair of numbers given to the points is generated, and the connection data is compared with design data which is produced from design information and expressed in the form of a circulation list of numbers given to points in linkage relationship, whereby determination of defectiveness of patterns is made basing on the result of comparison.
申请公布号 DE3475106(D1) 申请公布日期 1988.12.15
申请号 DE19843475106 申请日期 1984.04.13
申请人 HITACHI, LTD. 发明人 NINOMIYA, TAKANORI;NAKAGAWA, YASUO;SAITO, KEIYA
分类号 G01N21/956;G06T7/00;(IPC1-7):G01N21/88;G06F15/20 主分类号 G01N21/956
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