| 摘要 |
PURPOSE:To synthesize stoichiometrically reacted cubic boron nitride, by passing a nitrogen atom-containing gas through D.C. electric discharge, by exciting the above gas, by mixing the excited gas with a boron atom-containing gas, and by passing the resulting gaseous mixture through high-frequency plasma and introducing the above onto a substrate. CONSTITUTION:A nitrogen atom-containing gas and a boron atom-containing gas are separately supplied through introducing pipes 3, 4, respectively, into a reaction vessel 5. Then, D.C. electric discharge is carried out between the introducing pipe 3 and a counter electrode 6 to decompose and excite the nitrogen atom-containing gas. The excited nitrogen-atom gas is mixed with the boron atom-containing gas. The resulting mixed gas is passed through a high-frequency plasma produced by means of a high-frequency coil 9 and introduced into the heated surface of a substrate 10. By this method, the cubic boron nitride excellent in thermal shock resistance, thermal conductivity, hardness, wear resistance, and resistance to iron group metals at high temp. can be precipitated from a vapor phase.
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