发明名称 Method for manufacturing a semiconductor device free from current leakage through a semiconductor layer
摘要 An improved semiconductor device is disclosed which is free from current leakage due to pin-holes or other gaps. Also an improved method for processsing a semiconductor device is shown. According to the invention, gaps produced in fabricating process of the semiconductor layer are filled with insulator in advance of deposition of electrodes.
申请公布号 US4786607(A) 申请公布日期 1988.11.22
申请号 US19870092943 申请日期 1987.09.04
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI, SHUMPEI;SUZUKI, KUNIO;KINKA, MIKIO;FUKADA, TAKESHI;ABE, MASAYOSHI;KOBAYASHI, IPPEI;SHIBATA, KATSUHIKO;SUSUKIDA, MASATO;NAGAYAMA, SUSUMU;KOYANAGI, KAORU
分类号 H01L27/142;H01L31/0216;H01L31/20;(IPC1-7):H01L31/18 主分类号 H01L27/142
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