| 摘要 |
PURPOSE:To enable a measuring instrument to withstand the high and low temperature atmosphere in a thermostat and to maintain high accuracy by setting the tips of a couple of optical fibers for light projection and light reception adjacently to each other, reflecting light from the optical fiber for light projection by the surface of a sample and making the reflected light incident on the optical fiber for light reception, and measuring the displacement of the sample surface from the quantity of the incident light. CONSTITUTION:The optical fiber 1-2 for light reception is provided adjacently to the optical fiber 1-1 for light projection and then the light emitted from the optical fiber 1-1 becomes circular on a plane 2 and is reflected by the plane 2, so that the range of the light received by the optical fiber 1-2 becomes circular on the plane 2. The area of light reception that those two circles share is wider and wider as the intervals between the optical fibers 1-1 and 1-2 and plane 2 is larger and larger. For the purpose, the ratio of the quantity of the light emitted from the optical fiber 1-1 and the light received by the optical fiber 1-2 is known to know the distance between the tips of the optical fiber and plane 2.
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