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发明名称
摘要
申请公布号	JPS63167655(U)	申请公布日期	1988.11.01
申请号	JP19870059955U	申请日期	1987.04.22
申请人		发明人
分类号	G01N27/62;H01J37/252;H01J49/14;(IPC1-7):H01J49/14	主分类号	G01N27/62
代理机构		代理人
主权项
地址

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