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经营范围
发明名称
COOLED OPTICAL WINDOW FOR SEMICONDUCTOR WAFER HEATING
摘要
申请公布号
EP0135308(B1)
申请公布日期
1988.09.21
申请号
EP19840305062
申请日期
1984.07.25
申请人
GENUS, INC.
发明人
MAHAWILI, IMAD
分类号
H01L21/205;C23C14/54;C23C16/46;C23C16/48;C30B25/10;(IPC1-7):C23C14/28
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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