| 摘要 |
PURPOSE:To make it possible to pre-ionize uniformly a wide range, by providing at least one side electrode of discharge electrodes with a plurality of dielectric materials, arranging a plurality of the respective creeping discharge electrodes, and providing the center of the dielectric material with a trigger electrode. CONSTITUTION:At least one side electrode 1' of discharge electrodes 1 and 1' is provided with a plurality of dielectric materials 2, and trigger electrodes 3 are arranged at the center of each dielectric material. When a high voltage is generated in a resistance element 7 by a previously charged condenser 5 and a switching element 6, a creeping discharge generates on the surface of the dielectric material 2 between the trigger electrode 3 and the main electrode 1 via condensers 4 connected to the respective trigger electrodes 3, and, at the same time, a main discharge generates between the main electrodes 1 and 1'. Thereby, the respective creeping discharge are made uniform, and the main discharge region is uniformly ionized, so that the main discharge is made uniform and a pulse laser of large output and high efficiency can be obtained. |
