| 摘要 |
The present invention provides an optical method of quickly, easily, and accurately determining the degree of amorphism, surface roughness, and presence of a contaminating film on the surface of a SIMOX article. The reflectances of the SIMOX material and a reference single crystalline silicon material are compared. Reflectances are obtained at three selected wavelengths and used to evaluate three simultaneous equations which yield values for the parameters A, B, and C when A, B, and C represent the degree of amorphism, surface roughness, and surface contamination respectively.
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