| 摘要 |
PURPOSE:To prevent sticking of the material of a constituting member to a work by forming a projecting end so as to open the part to be worked of the work to the periphery and to support the same and disposing a work holder provided so as to be insulated from an electrode plate. CONSTITUTION:The distance between the part to be worked and a net 1 is set at 10-20mm and after the inside of a working chamber enclosing the same is evacuated to a vacuum, 0.3-2kV voltage of the same value as the value of an ion acceleration voltage is applied to the electrode plate 4 by a DC high voltage power supply 5 to project ions 10 toward the work 9 by an ion generator by which the work 9 is worked. Since the electrode plate 4 is charged positive at this time, the argon ions striking against the work 9 and bounding therefrom and the particles which are the constituting material of the work 9 bounced from the work and passed through the net are partly repelled by the electrode plate 4 but the electric charge thereof is lost by the net 1 connected to the ground, by which the adhesive power thereof to the work 9 is lost. |
