| 摘要 |
PURPOSE:To draw out processing liquid out of a filter tank easily by providing a means of feeding a high-pressure gas into the filter tank with a built-in filter element. CONSTITUTION:A filter tank 22 with a built-in filter element 10 is provided to receive a high-pressure gas to be fed. For example, in removing a processing liquid in a filter tank 22, a valve 7 is closed and a valve 5 is opened, and a high-pressure gas stored in a compressor 4 is guided into the filter tank 22 through a pipe 2 to press down the processing liquid in the filter tank 22. Then, the processing liquid pressed down is pressed out into a processing tank 40 through a pipe 26 and a pipe 28, and the larger part of the processing liquid in the filter tank 22 is removed out of the filter tank 22. As a result, processing liquid can easily be drawn out of the filter tank 22.
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