| 摘要 |
PURPOSE:To reduce generation of dust and to improve uniformity of sample treatment, by carrying in, one by one, a work rotatably supporting a sample, and providing plural treatment chamber which is evacuatable and is connected each other through a vacuum shutting means. CONSTITUTION:A sample is rotated by the rotation of a work 1 in a treatment of a treatment chamber, and is treated in this state. And the carrying-in of a work 1 from a loading means 6 to a carrying-in chamber 2, and the carrying- out of a work 1 from a carrying-out chamber 5 to an unloading means 7 are simultaneously carried out with the treatment in each treatment chamber. As a result, the stoppage of the treatment in the apparatus is eliminated when a work is carried in or out. A sample supported by a work 1 is intermittently moved from the loading means to the unloading means through the carrying-in chamber, each treatment chamber and the carrying-out chamber in order. |
