| 发明名称 |
Projection optical apparatus |
| 摘要 |
A projection optical apparatus comprises illuminating means providing for an illuminating light beam, a projection optical system including optical elements disposed across the illuminating light beam and having an imaging plane, and detecting mean including temperature sensor means provided on at least one of the optical elements and producing an output corresponding to the temperature of the one optical element.
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| 申请公布号 |
US4730900(A) |
申请公布日期 |
1988.03.15 |
| 申请号 |
US19850696085 |
申请日期 |
1985.01.29 |
| 申请人 |
NIPPON KOGAKU K. K. |
发明人 |
UEHARA, MAKOTO;MIZUTANI, HIDEO;MURAMATSU, KIYOYUKI;ASAMI, TAKESHI;TANIMOTO, AKIKAZU |
| 分类号 |
G03B27/34;G02B7/02;G02B7/09;G02B7/28;G02B21/24;G03F7/20;G03F7/207;H01L21/027;H01L21/30;(IPC1-7):G02B7/02;G02B27/52;G01J5/00 |
主分类号 |
G03B27/34 |
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