发明名称 THERMO-MECHANICAL OVERLAY SIGNATURE TUNING FOR PHOTOLITHOGRAPHIC MASK ALIGNER
摘要 Thermoelectric heat pumps are individually located at multiple flexures functioning to support a primary mirror which mirror reflects light from an aluminum mask onto a semiconductor wafer. The heat pumps are selectively energized to apply thermal stresses by heat or cold application at the flexures into the primary mirror suspension to compensate for distortions in the image transfer between the mask and the semiconductor wafer.
申请公布号 DE3469111(D1) 申请公布日期 1988.03.03
申请号 DE19843469111 申请日期 1984.10.26
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 YAU, DAVID WAI TAI;MODAVIS, ROBERT ADAM
分类号 H01L21/30;G02B5/10;G02B7/18;G02B7/198;G02B17/00;G02B17/06;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):H01L21/308 主分类号 H01L21/30
代理机构 代理人
主权项
地址