发明名称 1段階および2段階のウエハ緩衝材
摘要 Improvements in a single and dual stage wafer cushion is disclosed where the wafer cushion can use an edge hinge as a single first stage cushion and a second mid span hinge for the dual stage wafer cushion. This dual stage design gives two distinctly different cushioning forces as opposed to using a single stage design where the force is linear with the amount of compression that is being applied to the outer surfaces of the wafer cushion. The outside edge of the ring provides the greatest expansion such that only the outer edge of the ring makes contact with the outer edge of a wafer. The wafer cushion is a material that flexes and absorbs shocks before the shock is transferred to the wafer stack. The material minimizes debris or contaminants from embedding into the wafer cushion and also prevents sheading of material from the wafer cushion.
申请公布号 JP5986112(B2) 申请公布日期 2016.09.06
申请号 JP20130554410 申请日期 2011.04.22
申请人 テックスチェム アドバンスド プロダクツ インコーポレイテッド スンディリアン ブルハド 发明人 ピラント,ジェイムズ,ディー.;ウェイバー,アラン,エル.;マック,クリストファー,アール.;ミラー,デイビッド,エー.
分类号 H01L21/673;B65D85/86 主分类号 H01L21/673
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