VERFAHREN ZUM SPUELEN EINES SUBSTRATS,申请号DE19873723402-传众专利搜索

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发明名称	VERFAHREN ZUM SPUELEN EINES SUBSTRATS
摘要
申请公布号	DE3723402(A1)	申请公布日期	1988.01.28
申请号	DE19873723402	申请日期	1987.07.15
申请人	TOKYO OHKA KOGYO CO.,LTD.	发明人	KOBAYASHI,MASAKAZU;ASAUMI,SHINGO;TANAKA,HATSUYUKI
分类号	H01L21/30;G03C11/00;G03F7/00;G03F7/26;G03F7/42;H01L21/027;(IPC1-7):G03F7/00;H01L21/312;H01L21/47;H01L21/72	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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