| 摘要 |
PURPOSE:To make an ion source usable over a span of yet longer time, by installing a cooling device for a Freon cooling circuit or the like, in an anode electrode. CONSTITUTION:A cooling device 20 for a Freon cooling circuit or the like is installed in an anode electrode 6. With this installation, even if a thermion of a filament 6 is rushed, it is not thermally extended as being turned to high temperature. Therefore, each insulator of ceramic plates 7 and 7 set up side by side in the anode electrode 6 will not be damaged by the thermal expansion of the electrode 6, and is resistible to use for house, while an arc current can be made larger, thus a large current ion, namely, a large quantity of ions can be generated.
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