| 摘要 |
A modular wafer processing system requires a wafer handling arm with a minimum of moving or sliding surfaces which can generate dust. The arm is constructed of a first rigid arm (252) pivoted on the axis of a fixed cam (24) and a second rigid arm (256) with a wafer holder (280). A pulley (254) is rotatably mounted on the axis (272) of the pivot of the arms and a belt (243) extends around the pulley (254) and the cam (242). The belt (243) is fixed to the cam (242) at a point (242f). The arm is used in a wafer handling apparatus provided with reduced atmosphere chambers in modules (200a, 200b), Fig. 1 (not shown), to which process modules (301a, 301b) are attached. Gate value modules (100a, 100b etc) are provided between the chamber and process modules. <IMAGE>
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