发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PURPOSE:To curtail a manufacturing process by a method wherein, after a plurality of elements are formed on a semiconductor substrate by electrical isolation, openings for electrodes are provided in an insulating layer formed on the surfaces of the elements, a wiring layer is so connected as to cover the openings, and then the wiring layer is etched to be in a prescribed pattern with the elements made inactive partially. CONSTITUTION:All MOS transistors to be connected to intersecting points of a polysilicon wiring layer 2 and an aluminum wiring layer 1 are prepared in an active state. Then, an insulating layer 6 is formed on the surface of a semiconductor substrate 10 whereon these MOS transistors are constructed, and openings 7 are provided in all of the source-drain portions of the MOS transistors which are ROM components, so as to form a structure enabling the leading-out of electrodes. Then, aluminum, an aluminum alloy or the like is connected on the whole surface of the semiconducto substrate so that it covers the openings. Subsequently, a conductive wiring layer formed by this connection is patterned with a part thereof left behind so that it extends on the surface of the insulating layer 6 to short-circuit between sources and drains in in the portions of MOS transistors to be made inactive. By this method, a time required from alteration to completion of a final product can be curtailed.
申请公布号 JPS62230031(A) 申请公布日期 1987.10.08
申请号 JP19860073478 申请日期 1986.03.31
申请人 TOSHIBA CORP 发明人 HIRATA SEIICHI;MARUYAMA TADASHI
分类号 H01L21/3205;H01L21/82;H01L21/8246;H01L23/52;H01L27/10;H01L27/112;H01L27/118 主分类号 H01L21/3205
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