Cleaning of metal articles

摘要

A halide based process for the removal of surface oxidation and corrosion contamination from metallic articles especially cracked superalloy turbine components, which utilizes a pulsed pressure cycle. Preferably the cycle is established by alternate evacuation and replenishment. A cycle operating at 150 torr or less and utilizing CHF3 hydrogen and inert gas as atmosphere is described. The evacuation phase of each cycle should preferably reach 20 torr or less. The process is also applicable to etching for detection of near-surface flaws.