| 摘要 |
PURPOSE:To produce a high-speed sliding member having excellent wear resistance at a low cost by forming an intermediate layer having a high concn. of C on the surface of a base material essentially consisting of iron and contg. a specific ratio of C and depositing a ceramic layer on the intermediate layer. CONSTITUTION:The base material 10 essentially consisting of the iron and contg. >=0.05wt% C is worked to a prescribed shape and is suspended by a supporting member 11 in a reaction chamber 1. A matching box 15 and the supporting member 11 are connected, and after the inside of the reaction chamber 1 is evacuated, gaseous Ar is introduced into the reaction chamber from an introducing port 3 and is maintained under a prescribed pressure. Electric power is supplied from a power source 13 to a heater 12 to heat the base material 10 to about 150-300 deg.C and high-frequency electric power is impressed from a power source 14 to the base material 10 to generate plasma between the base material and an electrode 4. The C in the base material 10 is, therefore, once driven out from the base material and is brought into reaction with the iron atoms on the surface of the base material 10, by which the intermediate layer having the higher concn. of C than in the base material is formed on the surface of the base material 10. The connection of the matching box 15 is then changed over to the reaction chamber 1 and the connection of a shield 5 is connected to the supporting member 11, by which the ceramic layer is formed on the base material 10.
|
