发明名称 Semiconductor wafer mounting and cutting system
摘要 A semiconductor wafer mounting and cutting system including a wafer mounting machine for mounting a semiconductor wafer to a frame and a wafer cutting machine for receiving the frame and the wafer mounted thereto fed from the wafer mounting machine and cutting the wafer as required. The system further includes a controlling device for forming a relative relation signal showing a relative relation between a first indication which has been or is applied to the frame and a second indication of the wafer, which wafer has been or is mounted to the frame, and memory means for memorizing the relative relation signal formed by the controlling device.
申请公布号 US4696712(A) 申请公布日期 1987.09.29
申请号 US19850791488 申请日期 1985.10.25
申请人 DISCO ABRASIVE SYSTEMS, LTD. 发明人 NONAKA, YUZO
分类号 H01L21/301;B28D5/00;H01L21/00;H01L21/02;H01L21/67;H01L21/68;(IPC1-7):B32B31/18 主分类号 H01L21/301
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