发明名称 VERFAHREN ZUR HERSTELLUNG HAFTFESTER IC-SCHICHTEN
摘要 a) Process for the production of adherent iC layers for increasing the lifetime of cutting tools or the like. b) characterised in that, after an ionic cleaning of the supports and of the receivers, a bissilylated aromatic amine is ionised and a layer of Si-N-doped carbon with a thickness of between 5 and 10<-10> m is deposited, and after this the iC layer is formed. c) The invention relates to a process for the production of adherent iC layers for increasing the lifetime of cutting tools or the like.
申请公布号 DE3702242(A1) 申请公布日期 1987.09.17
申请号 DE19873702242 申请日期 1987.01.27
申请人 VEB HOCHVAKUUM DRESDEN 发明人 PEUKERT,WALTER,DIPL.-ING.;BECKERT,RAINER,DR.RER.NAT.;BUECKEN,BERND,DIPL.-PHYS.
分类号 C04B41/87;C23C16/02;C23C16/22;C23C16/26;C23C16/27;C23C16/30;C23C16/50;C23C28/00;C30B25/02 主分类号 C04B41/87
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