PROCESS AND DEVICE FOR MUTUALLY ALIGNING OBJECTS,申请号EP19830109475-传众专利搜索

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发明名称	PROCESS AND DEVICE FOR MUTUALLY ALIGNING OBJECTS
摘要
申请公布号	EP0135597(B1)	申请公布日期	1987.07.22
申请号	EP19830109475	申请日期	1983.09.23
申请人	IBM DEUTSCHLAND GMBH;INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	SCHEDEWIE, FRANZ, DR. DIPL.-PHYS.
分类号	H01L21/30;G01B11/00;G03F9/00;H01L21/027;(IPC1-7):G03B41/00	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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