| 摘要 |
The invention relates to a self-supporting mask clamped into a carrier frame with structures which are to be imaged onto a substrate by electromagnetic or particle radiation whose part having the structures, the so-called mask film, has a constant thickness and is surrounded by a part that is stabler in comparison with the mask film, the so-called reinforcing ring, and respectively connected thereto, mask film and reinforcing ring being stress-free at room temperature and with the mask film and the reinforcing ring being exposed to the electromagnetic or particle radiation during the imaging operation, and is characterized in that the reinforcing ring 2 comprises a material or is coated with a material which has the effect that the reinforcing ring expands to a greater extent than the mask film 1 under the incidence radiation and the power supply associated therewith, so that the mask film is tensioned during the imaging operation, and in that the reinforcing ring is fixedly connected to a so-called outer film 3, which may comprise the same material as the mask film, and which is fixed to the carrier frame 4 of the mask, the outer film likewise being stress-relieved at room temperature, but is tensioned during the imaging operation by virtue of the fact that the carrier frame is brought to a temperature matched to the incident power by means of a separate heat source. <IMAGE> |
