| 摘要 |
PURPOSE:To obtain an oscillator which has extremely low sensitivity to temperature whereas an inertia transducing part 8 is excited easily by cuff-shaped electrodes with low electric power by aligning a measurement axis to the mechanical axis of a substrate and setting the cutting angle of the substrate almost to alpha=+ or -5 deg.. CONSTITUTION:The substrate 6 uses the plate obtained by rotating a plate which is perpendicular to a Z axis by an angle alpha (-5-+5 deg.) around an X axis and by an angle beta (-10-+10 deg.) around an Y' axis, and an electrode, coil etc., are formed with high precision. A frame 7 is supported rotatably around the axis Z of rotation given an angular speed Q to be measured. This axis Z is selected coinciding with the direction of the mechanical axis Y' of crystal. A couple of tuning fork type oscillators 8a and 8b forming the inertia transducing part 8 in the frame is supported on the 1st ligament formed in the frame while containing the axis Z, and cuff-shaped counter electrodes 10a and 10b for exciting tuning fork type oscillators are formed on the surface by performing sputtering and then etching. |
