| 摘要 |
PURPOSE:To reduce the number of cables constituting a transmitting passage as well as to make a system change ever so easy, by connecting a man-machine controller to a system controlling controller with the looplike transmitting passage via respective transmitting parts. CONSTITUTION:An ion implanter controller is constituted of a system controlling controllers 61-63, performing control over plural systems for ion implantation and taking in monitoring data and outputting them, and man-machine controllers 64 and 65 performing information exchange with the aforesaid controllers, including respective transmitting parts 66-70. And, an interval between these respective transmitting parts 66-70 is connected together by a transmitting passage 71 of an optical fiber or the like in a single loop form. And, monitoring data and other information out of each of these controlling controllers 61-63 are received by these man-machine controllers 64 and 65, displaying them on cathode-ray tubes 87 and 88, thus monitoring takes place. Therefore, each transmitting passage is simplified in structure and thereby expansion and alteration in a system can be made ever so easy.
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