| 摘要 |
PURPOSE:To supply a host computer with signals, outputted by a circuit under inspection, already after preparatory processing accomplished while traveling through an inspection circuit by a method wherein said inspection circuit is built in a probe card itself. CONSTITUTION:A water 2 is subjected to inspection that is accomplished with a probe card 1 attached to a wafer prober. In an inspection process, the point of a probe 5 protruding from a prober main body 3 is caused to abut against a pad 22 of a pellet 21 installed on a wafer 2 that is the object of inspection, which establishes electrical contact between the pad 22 and probe 5. The signals outputted by the pellet 21 of the pad 22 are applied through the probe 5 to an inspection circuit 12 formed on a probe wafer 11. In the inspection circuit 12, a prescribed preparatory inspection us performed, which is accomplished on the basis of said outputted signals. The signals are outputted by the inspection circuit 12 as inspection data. The inspection data arrive at a host computer after traveling through a bump electrode 7b, wiring layer 8 belonging to the probe main body 3, and an external output cable 10.
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