| 摘要 |
A shock resistant accelerometer transducer comprises a two-part construction formed by selective etching from single crystal silicon. One part (12) comprises a transducer element having a movable seismic mass (122) and the other part comprises a support having a recess or groove (112) in which the mass is located, there being a small clearance between the recess and the mass. This limits the displacement of mass under high shock conditions. Being supported by resilient portions (123, 124 and 125) the seismic mass has three degrees of freedom. Signals are provided by strain gauges (126). <IMAGE> |
