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发明名称
SAMPLE CONVEYING DEVICE
摘要
申请公布号
JPS6295842(A)
申请公布日期
1987.05.02
申请号
JP19850235159
申请日期
1985.10.23
申请人
HITACHI LTD
发明人
KANAI NORIO;TAMURA NAOYUKI
分类号
B25J9/00;B25J18/02;H01L21/67;H01L21/677;H01L21/68
主分类号
B25J9/00
代理机构
代理人
主权项
地址
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