MANUFACTURE OF CONTROL TRANSISTOR FOR PANEL DISPLAY SCREEN AND CONTROL ELEMENT MANUFACTURED BASED THEREON

摘要

A method of fabrication of a control transistor for a flat-panel display screen involves the following steps: deposition of conductive material such as ITO on a substrate; etching of electrodes in the conductive material; successive depositions of layers formed of metallic material followed by n-doped amorphous semiconductor material; etching of a column and a connecting element in contact with the electrode; successive depositions of layers formed of undoped amorphous semiconductor material followed by insulating material and then by metallic material; etching in the three layers which have just been deposited of a row which overlaps the column and the connecting element.