发明名称 |
NOVEL NON-SINGLE CRYSTALLINE MATERIALS CONTAINING IR, TA AND AL |
摘要 |
There is provided a non-single crystalline material characterized by containing Ir, Ta and Al at the following respective composition rates: 28 atom percent ? Ir ? 90 atom percent, 5 atom percent ? Ta ? 65 atom percent, and 1 atom percent ? Al ? 45 atom percent. There is also provided a member comprising a substrate and a film composed of said non-single crystalline material being disposed on said substrate. |
申请公布号 |
CA2028124(C) |
申请公布日期 |
1995.12.19 |
申请号 |
CA19902028124 |
申请日期 |
1990.02.28 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
HASEGAWA, KENJI;SHIOZAKI, ATSUSHI;KIMURA, ISAO;TOUMA, KOUICHI |
分类号 |
B41J2/05;B41J2/14;B41J2/16;C22C5/04;C22C27/02;C22C30/00;(IPC1-7):C22C5/04;C23C14/16;C23C14/14;C22C45/10 |
主分类号 |
B41J2/05 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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