发明名称 NOVEL NON-SINGLE CRYSTALLINE MATERIALS CONTAINING IR, TA AND AL
摘要 There is provided a non-single crystalline material characterized by containing Ir, Ta and Al at the following respective composition rates: 28 atom percent ? Ir ? 90 atom percent, 5 atom percent ? Ta ? 65 atom percent, and 1 atom percent ? Al ? 45 atom percent. There is also provided a member comprising a substrate and a film composed of said non-single crystalline material being disposed on said substrate.
申请公布号 CA2028124(C) 申请公布日期 1995.12.19
申请号 CA19902028124 申请日期 1990.02.28
申请人 CANON KABUSHIKI KAISHA 发明人 HASEGAWA, KENJI;SHIOZAKI, ATSUSHI;KIMURA, ISAO;TOUMA, KOUICHI
分类号 B41J2/05;B41J2/14;B41J2/16;C22C5/04;C22C27/02;C22C30/00;(IPC1-7):C22C5/04;C23C14/16;C23C14/14;C22C45/10 主分类号 B41J2/05
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