发明名称 APPARATUS FOR GENERATING PATTERN ON WORK
摘要 <p>In a method of raster scanning a photosensitive material using a modulated laser beam, the beam is split into a plurality of independent beams which are independently modulated. As shown, a beam from a laser 10 is passed to a workpiece 34 via a splitter 13, acousto-optic modulator 16, dove prism 17 (to prevent interference), rotating polygon mirror 24, F-thete lens 26 and beam splitter 28 (to provide beams for (a) system control and (b) workpiece location). <IMAGE></p>
申请公布号 JPS6226819(A) 申请公布日期 1987.02.04
申请号 JP19860164877 申请日期 1986.07.15
申请人 ATETSUKU CORP 发明人 POORU SHII AREN;POORU EE WAAKENTEIN
分类号 B23K26/06;B23K26/067;B23K26/073;G02B5/08;G02B27/10;G03F1/00;G03F7/20;H01L21/027;H01L21/30;H01S3/101 主分类号 B23K26/06
代理机构 代理人
主权项
地址