| 摘要 |
PURPOSE:To reduce the relative vibration of a fine adjustment actuator against a coarse adjustment actuator by applying the force at a time to both the coarse adjustment actuator and the fine adjustment actuator set on the coarse adjustment actuator. CONSTITUTION:A coarse adjustment actuator 5 is driven gradually at a high speed by a servo amplifier 26 which receives the output of a reference speed pattern generating element 25. While a fine adjustment actuator 6 is driven by a servo amplifier 28 after undergoing both the mass correction and the mechanical loss correction through a mass correction element 27 and a friction correction element 32 respectively. The driving force of the actuator 6 is applied concurrently with that of the actuator 5. In addition, the actuation level ratio between the saturation characteristics 31 and 29 of both amplifiers 26 and 28 is set approximately equal to the mass ratio between both actuators 5 and 6. Thus the relative vibration of the actuator 6 can be reduced against the actuator 5.
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