| 摘要 |
PURPOSE:To enable for an operator to identify wafers visually and to eliminate inputting of the identification information, by attaching prealignment marks including wafer identification marks to the respective wafers. CONSTITUTION:Information concerning a reticle 1 set in a semiconductor printing apparatus is stored in an internal memory 16. When the reticle 1 is set, the reticle information is fed to an alignment confirming circuit 18 from the internal memory 16. When the wafer identification apparatus 17 finishes the prealignment, it receives information of the prealignment marks 20 from the prealignment circuit and reads an array of black and white sections of the wafer identification mark 19. The wafer identification apparatus 17 reads the identification information of the wafer from the pulse width of the video signal wave form 24. In this way, it can be eliminated that an operator identifies visually the wafer to input the identification information, and thus the information inputting and the alignment-and-monitoring operation by the operator can be removed to attain the automation of wafer identification. |
