| 摘要 |
PURPOSE:To insulate a sample from a vibration caused by the flow, evaporation or the like of a cryogen, by supporting a sample holder on a moving stage, thermally coupling the holder to a cryogen tank as a cooling source, and attaching the holder to a member to block the vibration. CONSTITUTION:A sample holder 1 for holding a sample cylinder 11 filled with a sample cylinder 11 is located between pole pieces 2. A cryogen tank 4 is supported as a cooling source on an outer shield 5 over the holder 1. The tank 4 and the sample holder 1 are thermally coupled to each other in such a manner that a vibration is blocked by a heat transfer member 24. A sample cooler is thus constructed for an electron microscope or the like. The sample cylinder 11 is cooled by the cryogen tank 4 through the heat transfer member 24 while the vibration caused by the flow or evaporation of a cryogen in the tank is absorbed. Therefore, the sample is stabilized so that an image of the sample is made with high resolving power.
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