| 摘要 |
<p>PURPOSE:To form a resistor which has less irregularity and stable resistance by laser trimming from one end of an electrode to one end of an adjacent electrode. CONSTITUTION:A conductor paste is printed on an SiC substrate having an insulating property of 10<13>OMEGAcm, and then baked at 850 deg.C for 10min in the atmopshere to form conductor circuits 2, 2' and electrodes 3, 3'. Then, an SiC substrate in which the paste is baked to form the circuits 2, 2' and the electrodes 3, 3' is set to a laser trimmer, a circuit board with resistors having 1, 5 and 10 slits trimmed under the conditions of 0.01mn of laser spot diameter, 1.5W of output and 13.3mm/sec of trimming velocity from a part including one end 2mm of the electrode 3 to a part including one end 2mm of the adjacent electrode 3' is obtained.</p> |
