MOISTURE DETECTION ELEMENT AND MANUFACTURE THEREOF

摘要

PURPOSE:To facilitate the detection of moisture, by providing polymer thin film on a substrate electrode for an amine dielectric body subjected to a quaternary treatment of amino group in a plasma polymer formed by a plasma polymerization. CONSTITUTION:A leader line 4 is connected to a comb-shaped electrode 2 formed on the surface of an insulated substrate 1. A polymer thin film 3 is formed on the surface of the electrode 2 and the surface of the substrate 1 for an amine dielectric subjected to quaternary treatment of an amino group in a plasma polymer formed by plasma polymerization. With such an arrange ment, the resistance value or the capacity value between electrode 2 varies corresponding to the changes in the moisture in the atmosphere. This facilitate the detection of moisture.