METHOD OF FREELY CARRIED DISTANCE MASK MAKING FOR DIMINISHING PROJECTION SYSTEMS,申请号CS19820007076-传众专利搜索

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发明名称	METHOD OF FREELY CARRIED DISTANCE MASK MAKING FOR DIMINISHING PROJECTION SYSTEMS
摘要
申请公布号	CS245264(B1)	申请公布日期	1986.09.18
申请号	CS19820007076	申请日期	1982.10.05
申请人	SCHMIDT,FRANK,DD;TYRROFF,HORST,DD	发明人	SCHMIDT,FRANK,DD;TYRROFF,HORST,DD
分类号	H01L21/027;G03F7/26;H01J9/14;H01L21/312;(IPC1-7):H01L21/70	主分类号	H01L21/027
代理机构		代理人
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