| 摘要 |
PURPOSE:To improve workability by mounting an adapter capable of fitting a probe card, which can set up a plurality of probe needles, to an XYZ stage. CONSTITUTION:An adapter 8 capable of mounting a probe card is installed to an XYZ stage 2. A desired number of probe needles are fitted to the probe card so as to coincide with the arrangement of terminals for a sample even to the sample having a large number of the terminals, thus connecting the stage 2 to all terminals in one sample in a substrate through one-time relative positioning adjustment by one probe manipulator. Accordingly, the restriction of a probing device is lifted while complicate positioning and the adjustment of theta may be conducted at a thus improving workability. |
