| 摘要 |
PURPOSE:To measure the three-dimensional position of a solid at each point in a non-contact state within a short time with good accuracy, by calculating the position of the solid at each point on the surface thereof on the basis of the positional information of each slit light in a pair of image pick-up outputs of the image pick-up means of each measuring device. CONSTITUTION:By the variability of the irradiation position of slit light of each light projection means 7 provided to each of non-contact measuring devices 5a-5d, the slit light irradiated parts of a solid 3 at every measuring devices 5a-5d are moved in the overlapped visual fields of pairs of image pick-up means 8alpha, 8beta provided to the measuring devices 5a-5d. The image of the slit light irradiated parts are respectively picked up by the image pick-up means 8alpha, 8beta of the measuring devices 5a-5d and the position of the solid 3 at each point on the surface thereof is calculated and measured on the basis of positional information of each slit light in a pair of image pick-up outputs at every slit light irradiated position of each of the measuring devices 5a-5d. |
