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经营范围
发明名称
FLOATING ZONE MELTING PROCESS
摘要
申请公布号
EP0054657(B1)
申请公布日期
1986.06.11
申请号
EP19810108512
申请日期
1981.10.19
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
MUHLBAUER, ALFRED, DR. PROF.
分类号
C30B13/00;C30B13/12;C30B29/06;H01L21/18;H01L21/208;(IPC1-7):C30B13/12
主分类号
C30B13/00
代理机构
代理人
主权项
地址
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