Device for automatically measuring path difference in interferometers

摘要

The invention relates to a device for automatically measuring path difference in interference microscopes. Said device is used for rapid detection of the temporal change in the interference state of objects which are to be investigated interferometrically in medicine, biology etc. This is achieved according to the invention when the path difference modulator arranged in an interference beam path supports outside the interference beam path in its direction of vibration a periodic scale material measure whose graduation period bears a constant ratio to the change in path difference. This scale material measure is scanned with the aid of suitable means.