发明名称 DISPENSER FOR ION SOURCE
摘要 A dispenser for supplying metal vapor to an ion source. The metal is provided in a capsule which may be broken to release the metal by turning a knob which causes a capsule housing to move to the right, thus causing the capsule to break against a piston member. The piston member communicates with a conduit which in turn communicates with the associated ion source, partly shown in the drawing. A heating mantle is provided to vaporize the metal in the housing so that it can pass from the dispenser through a conduit, to the ion source.
申请公布号 DE3270076(D1) 申请公布日期 1986.04.30
申请号 DE19823270076 申请日期 1982.06.01
申请人 IBT-DUBILIER LIMITED 发明人 PREWETT, PHILIP DOUGHTY;JEFFERIES, DEREK KIRK;PASHLEY, NEIL ARTHUR;COCKHILL, THOMAS DEREK
分类号 H01J37/08;H01J3/04;H01J27/02;H01J27/26;H01J49/04;(IPC1-7):H01J37/08 主分类号 H01J37/08
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