发明名称 |
DISPENSER FOR ION SOURCE |
摘要 |
A dispenser for supplying metal vapor to an ion source. The metal is provided in a capsule which may be broken to release the metal by turning a knob which causes a capsule housing to move to the right, thus causing the capsule to break against a piston member. The piston member communicates with a conduit which in turn communicates with the associated ion source, partly shown in the drawing. A heating mantle is provided to vaporize the metal in the housing so that it can pass from the dispenser through a conduit, to the ion source. |
申请公布号 |
DE3270076(D1) |
申请公布日期 |
1986.04.30 |
申请号 |
DE19823270076 |
申请日期 |
1982.06.01 |
申请人 |
IBT-DUBILIER LIMITED |
发明人 |
PREWETT, PHILIP DOUGHTY;JEFFERIES, DEREK KIRK;PASHLEY, NEIL ARTHUR;COCKHILL, THOMAS DEREK |
分类号 |
H01J37/08;H01J3/04;H01J27/02;H01J27/26;H01J49/04;(IPC1-7):H01J37/08 |
主分类号 |
H01J37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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