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发明名称
FLAT PLATE MAGNETRON SPUTTERING CATHODE ASSEMBLY AND MAGNET ASSEMBLY THEREFOR
摘要
申请公布号
JPS6164879(A)
申请公布日期
1986.04.03
申请号
JP19850140636
申请日期
1985.06.28
申请人
GENERAL MOTORS CORP
发明人
HAWAADO DEII KISUNAA
分类号
C23C14/36;C23C14/35;H01J37/34;H01L21/203;H01L21/285;H01L21/31
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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