| 摘要 |
PURPOSE:To provide a high-precision traveling table device with reasonable and large strokes by incorporating such an arrangement that three samples, on which a small static-pressure pneumatic bearing unit for straight motion is to be placed, are located with their moving directions oriented in the same direction. CONSTITUTION:Each static-pressure pneumatic bearing unit is composed of two stationary blocks 43, a straight moving member 44 and a guide shaft 42. The straight moving member 44 is hollow to allow the guide shaft 42 to penetrate therein. If compressed are is fed to this penetration part, a certain constant bearing clearance 45 is obtained to function as a static-pressure pneumatic bearing, and the straight moving member 44 can travel along the guide shaft 42. Three of such pneumatic bearing units are arranged on a basis 41. In order to unite these three straight moving members 42 into a single piece, a joint member 46 is provided. This joint member 46 becomes traveling table on which the specimen is placed. |
