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发明名称
MANUFACTURE OF SEMICONDUCTOR SINGLE CRYSTAL LAYER
摘要
申请公布号
JPH01162323(A)
申请公布日期
1989.06.26
申请号
JP19870320110
申请日期
1987.12.19
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
HIGASHINAKAGAHA IWAO
分类号
H01L21/263;H01L21/20
主分类号
H01L21/263
代理机构
代理人
主权项
地址
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