| 摘要 |
PURPOSE:To enable processing with high reliability by providing an abnormal- operation detecting means giving an alarm when laser beams are not irradiated as has been expected by comparing an output signal from a photoelectric detecting means and a pulse exciting lamp trigger signal. CONSTITUTION:Exciting beams b' from a xenon flash lamp 2 are converted into the quantity of electricity by a photoelectric conversion element 6, and an electric signal is changed into an output signal 9' easy to be processed logically by an analog processing section 9 and transmitted over a logic processing section 10. The logic processing section 10 generates an operation validation signal for a solid-state laser device in itself from a xenon flash lamp trigger signal 12 and the output signal 9' transmitted from the analog processing section 9. When the xenon flash lamp 2 for the solid-state laser device does not emit light as has been expected and laser beams are not irradiated, a signal is transmitted over an alarm display section 11, and abnormality is notified to an operator by a lamp, a buzzer, etc. Then, a processing equipment is stopped automatically by the alarm. |
