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发明名称
摘要
申请公布号	JPS6111155(U)	申请公布日期	1986.01.23
申请号	JP19840095566U	申请日期	1984.06.26
申请人		发明人
分类号	G11B7/26;G03F7/00;G03F7/30;H01L21/027;H01L21/30;(IPC1-7):G03F7/00	主分类号	G11B7/26
代理机构		代理人
主权项
地址

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