| 摘要 |
A slim rod is produced from molten silicon. It is heated to the decompn. temp. of a gas mixt. contg. silicon, and then transfered to a chem. vapor deposition chamber. A gas, like hydrogen, or helium is drawn from an inlet into the chem. vapor deposition chamber and moves upward to make a gas curtain. Another gas, like hydrogen chloride is drawn from another inlet and moves downward to make combination gas curtains. The chamber is kept warm enough to decomp. the gas mixt. contg. the silicon. After silicon crystals are deposited on the slim rod, and it grows in size, it is pulled out of the chamber.
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